Equipment

The microscopes can be used :

• By the members of the lab or partners, after a former training by the platform staff
• Under assistance of the platform staff, for a limited number of samples

TEM JEOL NeoARM 200F - Transmission Electronic Microscope

The TEM JEOL NeoARM 200F, a major facility financed by CPER Manutech Europe and Université Jean Monnet is a new, versatile and high-performance tool (first acquisition in Europe), serving the international reach of research at the Saint-Etienne Manufacture site.

Its capabilities are now further exploited, thanks to the mutualisation of financial and human resources within the CLyM federation, FED 4092.

The objective of the acquisition of this transmission microscope is to meet the needs of the scientific community that are not met by the equipments currently available within the CLYM. It meets the two specific needs that have been identified:

• Imaging and chemical analysis at the atomic scale (Ultra-HR STEM)
• Atomic scale spectroscopic analysis for fine chemistry (valence / chemical bonds) and plasmonics (study of plasmons)

Our JEOL NeoARM 200F is equipped with:

• Cold FEG source - Alignments @ 60, 80 & 200 kV
• Remote station
• Probe corrector: CEOS ASCOR (6^th order) + automatic software Cosmo JEOL
• Detectors :
      - STEM Bright Field JEOL
      - STEM Annular Dark Field JEOL
      - STEM Annular Bright Field JEOL (&e-ABF)
      - SEI/BEI JEOL
      - EDS SDD 1sr JEOL CENTURIO (single)
      - CaméraCMOS GATAN RIO 4k (bottom mount), drift correction
      - GIF Gatan Quantum ER
      - STEM Bright Field Gatan
      - STEM HAADF Gatan
• Specimen holders :
      - Single tilt:
            - Tomography +/- 70° (grids)
             - Tomography for FIB lamellae
      - Double tilt analytic Be

Performances :

SEM JEOL JSM-IT800-SHL - Scanning Electron Microscope

General Overview:

The IT800 field emission SEM (Scanning Electron Microscope), using electron-matter interaction, combines nanometric resolution imaging with high-performance, rapid chemical analysis capabilities. The version described here, equipped with a Super Hybrid Lens (SHL), enables observation and analysis at ultra-low accelerating voltages while maintaining the highest resolution.

Featuring a major innovation in column optics - "In-Lens emitter and ACL (Angle Control Lens) coupling" - this optical system enables high probe current with a small probe size.

It allows for ultra-high resolution imaging of magnetic samples with a working distance as short as 2 mm.

The acceleration-deceleration system within the objective lens minimizes lens aberrations at low voltage and enhances resolution.

• Magnification up to 2 million times.

• Two observation modes: High Vacuum and Variable Pressure (10 Pa to 300 Pa).

• 5-axis motorized stage (x, y, z, 360° rotation, tilt from -5° to +70°).

Additional analytical equipment includes:

• Retractable backscattered electron detector (provides varied contrast directly related to atomic number Z).

• Oxford EDS: SSD Ultim Max 100mm² detector.

• Oxford EBSD: HKL Advanced Symmetry; CMOS sensor; angular precision < 0.05°.

• GATAN Cathodoluminescence Detector: New-generation Monarc system with ultra-fast hyperspectral data acquisition; unmatched spatial (<10 nm), angular (1°), and wavelength (0.1 nm) resolutions.

Technical Specifications:

• Thermally assisted field emission source, “in-lens” type SCHOTTKY (JEOL patent).

• Resolutions:

• With deceleration: 0.5 nm at 30 kV, 0.7 nm at 1 kV
• Without deceleration: 5 nm at 30 kV, 1.2 nm at 1 kV
• In Low Vacuum at 50 Pa: 1.2 nm at 30 kV, 1.5 nm at 5 kV

• Continuous probe current: from 1 pA to 500 nA (at 30 kV).

• Beam deceleration up to 5 kV bias applied to the sample stage.

• Automated and secure load-lock system (SAS): allows sample exchange in under 2 minutes.

• Large chamber: supports samples up to 60 x170 mm (Height x Width).